About: http://webisa.webdatacommons.org/335613481

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such a material may advantageously be chosen from the group including poly-silicon, silicon nitride, metal silicides, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com