| http://www.w3.org/ns/prov#value | - FIG. 1A is a cross-sectional side view of an exemplary rapid temperature excursion system for use in the non-destructive test system of FIG. 1, in which a target surface of a wafer is directly and evenly heated by a bank of heat lamps while the wafer is rotatably and translatably suspended in the chamber.
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