About: http://webisa.webdatacommons.org/342193435

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A first dielectric material, such as SiN or other suitable dielectric material is deposited over preprocessed wafer 210 to provide first dielectric material layer 224 a.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr