About: http://webisa.webdatacommons.org/34776823

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to a foreign particle inspection apparatus for detecting foreign particles adhered on circuit patterns such as reticles or photomasks (hereinafter called reticles, etc.).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com