| http://www.w3.org/ns/prov#value | - Recently, to cope with the increase in size, the light-weight, and the thickness reduction of display devices, a technique called thin-film sealing has been employed in which a thin film mad of an inorganic compound such as silicon nitrides, silicon oxides, ceramics, or the like, which is transparent and has high gas barrier properties, is formed on light-emitting elements by high-density plasma v
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