| http://www.w3.org/ns/prov#value | - example track 1???(metalloamide/purge (inert)/co-reactant+N2O/purge (inert))n cycles; example track 2???(metalloamide+aminosilane/purge (inert)/N2O/purge (inert))n cycles; example track 3???(metalloamide+co-reactant N2O/co-reactant water vapor/purge (inert))n cycles; example track 4???(metalloamide+co-reactant N2O/aminosilane/co-reactant water vapor/purge (inert))n cycles. wherein n is an integer
|
