About: http://webisa.webdatacommons.org/353348297

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to another embodiment of the present invention, a diffusion barrier layer as intermediate layer 38 may be formed using a refractory metal silicides such as TiSi2, TaSi2, MoSi2 or WSi2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com