| http://www.w3.org/ns/prov#value | - Such a smaller diameter of the second opening 323 may decrease the program current.The first and second electrodes 319 and 327 may be formed of a single or compound layer selected from the group including a conductive material containing a nitride element, a conductive material containing a carbon element, titanium, tungsten, molybdenum, tantalum, titanium silicide and/or tantalum silicide.
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