About: http://webisa.webdatacommons.org/356865201

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Depositing a thin metallic film, with the generic formula MxSiyNz, on a high-k film or a low-k film may be useful either as an electrode such as a gate electrode or a barrier layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es