PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The solution is an integrated MEMS-based sensors fabricated by a MEMS-first CMOS process methodology.
http://www.w3.org/ns/prov#wasQuotedFrom
  • sbir.gov