About: http://webisa.webdatacommons.org/369658286

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, layer 51 is a metal or other thin film (such as doped polysilicon, metal silicides, aluminum oxide, silicon oxide, silicon nitride, or combinations of films), having a thickness of about 0.1 ??m to about 0.5 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com