About: http://webisa.webdatacommons.org/371148564

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 12A is a plan view showing the inspection pattern and subsidiary patterns as a standard of measurement degree of the reticle in the embodiment of the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com