About: http://webisa.webdatacommons.org/372997645

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A planar flexure layer 408 made from a material such as silicon dioxide or silicon nitride is bonded to the outward face of the plate 407.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com