About: http://webisa.webdatacommons.org/377316523

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For this reason, in order to obtain, e.g., desired flatness, such a process as a planarization process is required to be performed before forming the piezoelectric thin film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es