About: http://webisa.webdatacommons.org/378371828

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, the invention is applied to a manufacturing system for manufacturing semiconductor devices by printing a circuit pattern of an original, such as a reticle or photomask, on a wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au