| http://www.w3.org/ns/prov#value | - Each of the thin film transistor 170 a of FIGS. 5A and 5B and the thin film transistor 170 b of FIGS. 5C and 5D is an example in which end portions of the source and drain electrode layers 105 a and 105 b and end portions of the source and drain regions 104 a and 104 b are not aligned with each other over the semiconductor layer 103, and part of the source and drain regions 104 a and 104 b is expo
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