| http://www.w3.org/ns/prov#value | - FIGS. 11A, 12A, 13A, 14A, and 15A are a plan view showing a different sensor device, respectively; FIGS. 11B, 12B, 13B, 14B, and 15B are a cross-sectional view showing the sensor device taken along a line VIII--VIII, respectively: and FIGS. 11C, 12C, 13C, 14C, and 15C are a cross-sectional view showing the sensor device taken along a line VII--VII. FIG. 16A is a plan view showing another sensor de
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