About: http://webisa.webdatacommons.org/384197765

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	SUMMARY OF THE INVENTION There is a need in the art to improve the image resolution obtainable with a charged particle beam column by providing a novel charged particle beam column and a method of its operation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com