About: http://webisa.webdatacommons.org/389109069

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Herein, the gate insulating layer 90 a is made of an inorganic insulating material, such as silicon oxide (SiOx) or silicon nitride (SiNx).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com