About: http://webisa.webdatacommons.org/401553027

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is particularly applicable to embodiments in which the thickness (n2) of the polysilicon layer is less than or equal to three times the thickness (n1) of the gate oxide region.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com