About: http://webisa.webdatacommons.org/401664604

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The capping layer pattern 612 may include, for example, an oxide such as silicon oxide or a nitride such as silicon nitride, however, any suitable oxide, nitride, or combination thereof may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com