About: http://webisa.webdatacommons.org/401986413

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate spacers 34 may comprise silicon oxide, silicon nitride, silicon oxynitride, or other dielectric materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com