| http://www.w3.org/ns/prov#value | - The Group IVB or VB metal precursor is a halogen-containing compound of the formula MXa wherein M is a Group IVB or VB metal, i.e., Ti, Zr, Hf, V, Nb or Ta, X is a halogen such as Cl, Br, I or a mixture thereof, and a is the valence state of the Group IVB or VB metal i.e., 4 or 5.
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