| http://www.w3.org/ns/prov#value | - blocked from said workpiece by said body; wherein said body is positioned to act as a dark space shield so that sputtering from said central portion of said target is inhibited; said body including a surface extending in a direction substantially parallel to said flat sputtering surface of said target; transmitting energy to said chamber through a coil; sputtering at least a portion of said outer
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