About: http://webisa.webdatacommons.org/40929161

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In order to form cavities such as contact holes, line spacings or trenches in the dielectric layer 34, a photoresist layer 38 must first be deposited on top of the dielectric layer 34.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com