About: http://webisa.webdatacommons.org/410660210

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a result, the tungsten films are deposited to the same thickness on the conductive layers of the different conductive types because the growth rate of the tungsten is kept invariable on the same conductive type.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com