About: http://webisa.webdatacommons.org/423710942

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A diffusion barrier or capping layer such as silicon carbide may then be deposited over the copper routes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com