About: http://webisa.webdatacommons.org/433595424

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, planarization layer 62 is a material such as polyimide, spin-on glass, or any other suitable protective material which can be applied to a uniform depth over surface 60a of conducting layer 60.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk