About: http://webisa.webdatacommons.org/433757987

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2A is a cross sectional side view of a possible raised area pattern to be used to achieve faster polishing at the center of a substrate;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com