About: http://webisa.webdatacommons.org/43528209

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Similarly, silicon nitride (Si3 N4), silicon carbide, SiOx Ny, amorphous silicon and other layers can be deposited using the apparatus of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au