About: http://webisa.webdatacommons.org/437578698

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, a dry etching process such as reactive ion etching, ion beam etching and plasma etching is employed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com