About: http://webisa.webdatacommons.org/446992573

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, during batch fabrication of MEMS devices, process variations and limitations, contaminants, and other factors can result in fabrication tolerances that give rise to substantial variation in device properties.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com