About: http://webisa.webdatacommons.org/44716151

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, a material such as SiO2, SiN, SiON, or a combination thereof can also be used as the first spacer 285.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com