About: http://webisa.webdatacommons.org/447736729

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	plasma etching a back side of the semiconductor chip and removing silicon from an exposed back side of the semiconductor chip, wherein the plasma etching process is highly selective with respect to materials other than the silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es