About: http://webisa.webdatacommons.org/450645676

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a first step of forming a layer to be peeled including TFT on a first substrate;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com