PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • An optical system, in particular an illumination system or a projection lens of a microlithographic exposure system, according to one aspect of the present disclosure has an optical system axis and at least one element group including three birefringent elements each of which including optically uniaxial material and having an aspheric surface, wherein:
http://www.w3.org/ns/prov#wasQuotedFrom
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