About: http://webisa.webdatacommons.org/452539995

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This can result in a slowing or cessation of the etch before the material is completely removed from the lands or other features, and can also result in profile anomalies.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com