About: http://webisa.webdatacommons.org/454555688

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph generally showing the wafer material removal rate in view of the pressure exerted by the conditioning disk on the polishing pad.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com