About: http://webisa.webdatacommons.org/50856190

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The wiring layer 22 is made up of a layer composed mainly of Al or a layer composed mainly of W, and the first metal pattern 11 a is formed by patterning after forming the adhesion layer 21 and the wiring layer 22 in that order.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com