About: http://webisa.webdatacommons.org/51407982

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The spacer is a structure which protects the substrate from being destroyed or bended by the pressure stress due to the high vacuum in the FED and maintains the upper and lower panels in the gap of 100???3000 ??m conventionally.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com