About: http://webisa.webdatacommons.org/51650063

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The etch chamber of claim 1 wherein the etch chamber further includes a propeller provided in the bottom portion of the outer chamber, the propeller being mounted on a shaft, and further including a turbine mounted on the shaft.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com