About: http://webisa.webdatacommons.org/52396523

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein fabricating the interferometric modulators of the first, second, and third types further comprises removing the first, second, and third sacrificial layers after forming the first and second optical layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com