About: http://webisa.webdatacommons.org/52441951

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The loadlock is a loading chamber into which silicon wafers are loaded.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au