About: http://webisa.webdatacommons.org/59204126

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, other deposition techniques and materials can be used, including spin on glass, spin on polymer (e.g., polyimide, BCB, SU8), and perelyne.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es