| http://www.w3.org/ns/prov#value | - In the cleaning device 51 of this embodiment, the four cleaning nozzles 54, 55, 56 and 49 perform cleaning by different cleaning methods: ultraviolet cleaning, ozone water ultrasonic cleaning, hydrogen water ultrasonic cleaning, and rinse cleaning, so that it is possible to perform various types of cleaning with a single cleaning device.
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