About: http://webisa.webdatacommons.org/60182025

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, any suitable device, such as a semiconductor or other solid state device, such as transistors, capacitors, fuses, etc. may be patterned using this lithography method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com