About: http://webisa.webdatacommons.org/61451573

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating film 83 is formed of an organic insulating material having a low dielectric constant such as polyimide which has a lower dielectric constant than SiO2(CVD???SiO2) or CVD- SiO2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com