About: http://webisa.webdatacommons.org/62233627

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preclean procedures and chemicals are also used to prepare metal surfaces, such as aluminum or copper surfaces, at interconnect interface sites.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca