About: http://webisa.webdatacommons.org/64294453

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph showing the buffered hydrofluoric acid solution etch rate with respect to the quantity of fluorine in the above-described Si oxide film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com