PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Over time, automated methods have been developed to deposit conductive materials on substrates, in layers of substrates, or through cavities such as trenches, holes, and vias of a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com